http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021084933-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_55f14f1aa51478ec6e75b48e47758577 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2020-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a68d6c01498870dbf8c66d1558da6c45 |
| publicationDate | 2021-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2021084933-A1 |
| titleOfInvention | Inspection device, method, and program |
| abstract | Provided is an inspection technology whereby the target for inspection is not limited to pattern defects.　This inspection device inspects a target object and comprises: an acquisition unit that obtains a plurality of measurement data from measurement data for prescribed positions in prescribed patterns on the target object; and a distribution analysis unit that analyses the distribution between the prescribed patterns. |
| priorityDate | 2019-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.