| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_973fd4b8b31ba49ee9967003534e1eb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2020-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab7a96b58f5987e3d848ba9edb7946e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43ae2e56d457eaafdc9453b09256b440
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f333f705b4f959bc24e2780ce980aa51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d04dd6b2058ea59217e35af0e4fe7c56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20af0e9f2f02e999b5ed67b4488f967d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcb2647abd8fb838f4f4e901d4f03286 |
| publicationDate |
2021-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2021081162-A1 |
| titleOfInvention |
Composition and method for silicon oxide and carbon doped silicon oxide cmp |
| abstract |
A chemical mechanical polishing composition for polishing a substrate having a silicon oxygen material includes a liquid carrier, cubiform ceria abrasive particles dispersed in the liquid carrier, and an organic diacid. |
| priorityDate |
2019-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |