| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_34c88c465202a4bc7d8388cca9c9bf52 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8887
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8858 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06V10-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F18-2433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T5-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8851 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06V10-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-10 |
| filingDate |
2020-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b028b1af5ee454de9e6a529e5b853c7 |
| publicationDate |
2021-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2021062069-A1 |
| titleOfInvention |
Equi-probability defect detection |
| abstract |
For semiconductor inspection images, detection thresholds can be determined based on probability density functions at a pixel intensity. The detection thresholds can then be applied to an image. This can find outliers at a fixed probability at all pixel intensity levels by estimating the probability distribution of underlying data and adapting the detection threshold values. Laser power can be optimized based on the detection thresholds. |
| priorityDate |
2019-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |