| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_34c88c465202a4bc7d8388cca9c9bf52 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-20224 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06V10-7625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06V10-7753
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F18-231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06V10-763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T5-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T5-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06V10-761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F18-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F18-23213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06V10-764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06V10-7515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F18-2155 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06V10-764 |
| filingDate |
2020-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f047cece2ed273f5c0568bdfa5459a66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5ecdee757df176767a296dfbb46bd97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22802baf5b1d427083cd764edd967876
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bcc48c7655e98e8a73ce3533012c9c2 |
| publicationDate |
2021-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2021061499-A1 |
| titleOfInvention |
Unsupervised learning-based reference selection for enhanced defect inspection sensitivity |
| abstract |
An optical characterization system and a method of using the same are disclosed. The system comprises a controller configured to be communicatively coupled with one or more detectors configured to receive illumination from a sample and generate image data. One or more processors may be configured to receive images of dies on the sample, calculate dissimilarity values for all combinations of the images, perform a cluster analysis to partition the combinations of the images into two or more clusters, generate a reference image for a cluster of the two or more clusters using two or more of the combinations of the images in the cluster; and detect one or more defects on the sample by comparing a test image in the cluster to the reference image for the cluster. |
| priorityDate |
2019-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |