| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_989ecca69fc47fadd546bf9a0db59629 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E21B49-08 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29D11-00 |
| filingDate |
2019-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae709ae393b256595c6789c013fe73d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_429d6c9612bb50d4f11d023465d03e90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76d81a93dacab420f97539dfb4a842a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1467bc2ec15493df20217881806dfab3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e71d09396e64d51e841b3198fc5a5560
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7f858d93a439ec84ea15c6dd36ddf67 |
| publicationDate |
2021-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2021054984-A1 |
| titleOfInvention |
Customized thin film optical element fabrication system and method |
| abstract |
A system comprising (i) thin film optical element comprising substrate and thin film stack (>2 film layers; uniform thickness - variation of less than + 5% in any 10 mm2 stack) deposited on substrate's first side; (ii) holder comprising at least one opening; wherein holder has inner side and outer side having beveled edge extending into lip having flat side and beveled edge side; wherein beveled edge/beveled edge side of lip form angle <45o with flat side of lip/first side; wherein flat side of lip and holder inner side define socket receiving substrate; wherein opening exposes first side to deposition plume; wherein first side contacts flat side of lip, thereby allowing film stack deposition on first side; wherein beveled edge side/beveled edge provide film uniformity, and (iii) deposition source providing plume traveling towards first side perpendicular to flat side of lip/first deposition side; and wherein beveled edge side faces plume. |
| priorityDate |
2019-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |