| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d3b0bb8c2b7c35b9186ae51aceaae04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-12 |
| filingDate |
2020-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33811a008227aaccf9629d2870c32bc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e940ab20913acb5e10078d8174a198bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45bb7203e6fff14ed49afe83cabcc88a |
| publicationDate |
2021-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2021053218-A1 |
| titleOfInvention |
Micro and nano structuring of a diamond substrate |
| abstract |
The invention is directed to a process of structuring a diamond substrate (2), comprising the steps of (a) depositing an adhesion layer (14) on a face of the diamond substrate (2); (b) coating a resist layer (16) on the adhesion layer (14); (c) removing parts of the resist layer (16) so as to expose parts of the adhesion layer and form a corresponding structuring mask (24); (d) etching the adhesion layer (14) and the diamond substrate (2) through the structuring mask (24) so as to structure (28) said diamond substrate (2); wherein the adhesion layer (14) is a non-metallic compound comprising oxides. |
| priorityDate |
2019-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |