http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021052839-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c7d4d0cdc9f5df2ad6a9e21f7ad7611 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1476752f2420c8f8eb53464cf7fc922b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-56 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G11-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G11-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G11-50 |
| filingDate | 2020-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b2b47c71ccaa7261cad0c7376fb1ae5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5977ba1d920ca7f50d09cea42c3653c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98e7fa2e1008ab3d6c2e3726e8724bb1 |
| publicationDate | 2021-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2021052839-A1 |
| titleOfInvention | Low defect high capacitance thin solid electrolyte capacitor and method of fabrication thereof |
| abstract | A method of fabricating a capacitor is proposed. The method comprises forming a three-dimensional structure over a substrate, the three-dimensional structure comprising a region having elongated pores extending towards the substrate from a top surface of the three-dimensional structure remote from the substrate or elongated columns extending away from the substrate towards the top surface of the three-dimensional structure remote from the substrate; forming a first electrode layer over a surface of said region of the three- dimensional structure, the first electrode conformal to said surface of said region; forming an intermediate layer over the first electrode layer; and forming a second electrode layer over the intermediate layer, the second electrode layer conformal to the intermediate layer, wherein forming the intermediate layer comprises forming a solid-state electrolyte layer partially conformal to the first electrode layer; and forming a dielectric layer conformal to the first electrode layer. |
| priorityDate | 2019-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.