| abstract |
[Problem] To provide a composition for coating a substrate with level difference, said composition forming a coating film that is capable of filling and flattening a pattern. [Solution] A composition for coating a substrate with level difference, said composition containing a solvent and a compound (A) which serves as a base material, and which contains a partial structure that is represented by formula (A-1), formula (A-2) or formula (A-3). This composition for coating a substrate with level difference is cured by means of light irradiation or heating. In formula (A-1) and formula (A-2), the broken line represents a bond to an aromatic ring; the aromatic ring constitutes a polymer skeleton or a monomer; and n represents an integer of 1 or 2. In formula (A-3), the chain line represents a bond to a carbon chain, alicyclic carbon ring or aromatic ring that constitutes a polymer skeleton; Q represents a single bond or an organic group having an ether bond, an ester bond, a urethane bond, an alkylene bond having 1 to 3 carbon atoms or an amide bond; and m represents 1. Formula (A-3) does not include formula (A-1). |