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filingDate 2020-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd79976d365387f2862b87fdf00b7127
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publicationDate 2020-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2020262234-A1
titleOfInvention Polishing liquid composition for silicon oxide film
abstract In an aspect, provided is a polishing liquid composition capable of improving polishing selectivity while ensuring the polishing speed of a silicon oxide film. An aspect of the present disclosure pertains to a polishing liquid composition which is for a silicon oxide film and contains cerium oxide particles (component A), a water-soluble polymer (component B), an anionic condensate (component C), and an aqueous medium, wherein the component B is a polymer containing a structural unit b1 represented by formula (I).
priorityDate 2019-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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