| abstract |
The present utility model discloses a combustible gas sensor based on WO3 nano-film, wherein, the sensor is a flat plate type structure and sequentially comprises a monocrystalline silicon wafer, a silicon dioxide nano-film, a silicon nitride nano-film, a platinum electrode film and the WO3 nano-film from bottom to top. The sensor of the utility model takes the WO3 nano-film as a sensitive material, the WO3 nano-film is prepared by magnetron sputtering coating, which has higher sensitivity to combustible gases such as hydrogen and carbon monoxide. |