| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c10320b05f723976a898536f012b60c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F25-40 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F35-71761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F35-2211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F25-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F33-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F35-831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F25-4331
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F35-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F35-711 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F13-00 |
| filingDate |
2020-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cf78502efa459d0b6b5d5a8192b89e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81254385914533c6069a902425b27422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a6ab0659409d402ecbfde942405fffb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5930e62858724695a1ca9d80fc6c8fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fb53fc400aa1b01a03ce090859b51f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_731a14111408028abf5f032c4cd42f7a |
| publicationDate |
2020-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2020222940-A1 |
| titleOfInvention |
Point-of-use dynamic concentration delivery system with high flow and high uniformity |
| abstract |
A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer. |
| priorityDate |
2019-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |