| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98f92c496e4f5c70f34681fb4bf526d2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4494
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61N2007-0078
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61N7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B2201-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-036 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2406 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B06B1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L7-08 |
| filingDate |
2020-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7a2af2a7077b4cae2dd46c2224851e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62b794526f4f4dadb8732afcd0841e2e |
| publicationDate |
2020-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2020210483-A1 |
| titleOfInvention |
Segmented getter openings for micromachined ultrasound transducer devices |
| abstract |
An ultrasonic transducer device includes a bottom electrode layer of a transducer cavity disposed over a substrate, and a plurality of vias that electrically connect the bottom electrode layer with the substrate. A bottom cavity layer is disposed over the bottom electrode layer, and one or more openings are formed in the bottom cavity layer so as to expose a region of the bottom electrode layer, wherein locations of the one or more openings are segments that are disposed proximate an outer perimeter of the transducer cavity and substantially correspond to locations where the plurality of vias are not disposed directly beneath. |
| priorityDate |
2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |