| abstract |
Provided is a silicon nitride powder having a total amount of fluorine of 100-1000 mass ppm and a total amount of Fe, Al, and Ca of 100-1000 mass ppm. Provided is a method for producing silicon nitride powder that has a step for sintering a raw material including silicon powder and a fluoride with a content of fluoride to silicon powder of 0.1-2 mass% in a mixed atmosphere including at least one selected from the group consisting of nitrogen, hydrogen, and ammonia to obtain a sintered product, and a step for treating the sintered product by hydrofluoric acid having a hydrogen fluoride concentration of 10-40 mass%. |