http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020171934-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8a9982b1666c54b5bf02d6c944891e4 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C29-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25B11-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C32-0614 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6838 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C32-0603 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2020-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0ed402d6b40f154f364f2d4d5729059 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95d8d2a411f2a93adf47d7eece092c00 |
| publicationDate | 2020-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2020171934-A1 |
| titleOfInvention | Apparatuses and methods for non-contact holding and measurement of thin substrates |
| abstract | An apparatus for holding a thin substrate includes a plurality of positive pressure regions including a porous material having an upper surface and a gas flowing outward from the upper surface, the gas producing a positive pressure above the upper surface in the positive pressure regions. The apparatus includes a plurality of negative pressure regions interspersed with the plurality of positive pressure regions, the negative pressure regions exerting a holding force on a bottom surface of the thin substrate. The negative pressure regions and the positive pressure regions operate to maintain the bottom surface of the thin substrate a distance from the upper surface of the porous material in the positive pressure regions. Methods of holding a thin substrate with the apparatus are also disclosed. |
| priorityDate | 2019-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.