http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020166823-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e4830aae233abbc7e357cbf7831b37e7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2020-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4cc6252249806525fc69563bf5c5cb0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea938a204c8379e74bfea3a87eaa5526 |
| publicationDate | 2020-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2020166823-A1 |
| titleOfInvention | Valve module and substrate processing device comprising same |
| abstract | The present invention relates to a valve module and a substrate processing device comprising same and, more particularly, to a valve module installed in a flow path through which a gas activated by plasma flows, and a substrate processing device comprising same. Disclosed is a valve module (400) installed in a substrate processing device comprising: a process chamber (100) which forms a substrate processing space (S); and a flow path portion (300) which is coupled to the process chamber (100) and forms a flow path (302) through which a gas activated by plasma flows, wherein the valve module (400) comprises: an opening/closing plate (410) which is installed so as to be capable of moving back and forth across the flow path (300), through an opening slit (301) which is provided on one side of the flow path portion (300), so as to open and close the flow path (302); a first driving portion (420) which drives forward and backward movement of the opening/closing plate (410); an opening/closing plate protection portion (430) which moves into the space between the opening/closing plate (410) and the flow path (302) to prevent the opening/closing plate (410) from being damaged by the activated gas, when the opening/closing plate (410) moves backward and keeps the flow path (302) open; and a second driving portion (440) which drives the movement of the opening/closing plate protection portion (430). |
| priorityDate | 2019-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.