http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020156975-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-6402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-006 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2020-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8eb944586e36b3e905123e534d70a85f |
| publicationDate | 2020-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2020156975-A1 |
| titleOfInvention | Determining moving properties of a target in an extreme ultraviolet light source |
| abstract | An apparatus includes: a diagnostic system configured to diagnostically interact with a current target (110c) traveling along a trajectory (TR) and before the current target enters a target space; a first detection apparatus (120) configured to detect first light; a second detection apparatus (130) configured to detect second light; and a control system (150) in communication with the first and second detection apparatuses. The first light includes: light (140) produced from an interaction between the current target and the diagnostic system, and light (142) emitted from a plasma produced by a previous target. The second light includes the light (142) emitted from the plasma produced by the previous target. The control system (150) is configured to: produce an analysis signal based on first and second signals produced from respective outputs of the first and second detection apparatuses; and estimate a property of the current target based on the produced analysis signal. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11313727-B2 |
| priorityDate | 2019-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.