| abstract |
According to an embodiment of the present invention, a processing device is provided, that processes a byproduct produced in a reaction of a source material containing silicon and a halogen or a reaction between a source material containing silicon and a source material containing a halogen. The processing device includes a processing liquid tank, a processing vessel, a supply mechanism, and an exhaust mechanism. The processing liquid tank stores a processing liquid that contains a basic aqueous solution. A member to be processed containing a byproduct is placed in the processing vessel. The supply mechanism supplies the processing liquid from the processing liquid tank to the processing vessel and processes the byproduct in the processing vessel with the supplied processing liquid. The exhaust mechanism discharges, from the processing vessel, gas generated by the reaction between the processing liquid and the byproduct. |