http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020137173-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59148b5c460776b9c88fb9bfc2cfd36f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2033-0095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-1006 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N35-1009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N35-1095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2019-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e42cc8a83c0680ef9d627be20a440405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d09c3886aacf7c8c4d820cfb2d61f54e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19c99c30aefd4949ae8a79cedcb9f364 |
| publicationDate | 2020-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2020137173-A1 |
| titleOfInvention | Substrate analyzing method and substrate analyzing device |
| abstract | The present invention provides an analyzing technique capable of analyzing a substrate end more easily and more quickly. A substrate analyzing method according to the present invention using a substrate analysis nozzle for discharging an analysis liquid from the tip, sweeping the substrate surface with the discharged analysis liquid, and sucking the analysis liquid, is characterized by comprising: disposing a liquid reception plate for receiving the discharged analysis liquid at a position opposite to the tip of the nozzle; holding the analysis liquid discharged from the tip between the tip of the nozzle and the liquid reception plate, adjusting the position of the substrate such that the substrate end can be inserted between the tip of the nozzle and the liquid reception plate; bringing the substrate end into contact with the analysis liquid held between the tip of the nozzle and the liquid reception plate; and simultaneously moving the nozzle and the liquid reception plate along the peripheral edge of the substrate in a state where the substrate end is in contact with the analysis liquid so as to allow the substrate end to be analyzed. |
| priorityDate | 2018-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.