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publicationDate 2020-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2020102611-A1
titleOfInvention Using deep learning based defect detection and classification schemes for pixel level image quantification
abstract A heat map of probable defects in an image can be represented as a matrix of defect probability index corresponding to each pixel. The image may be generated from data received from a detector of a scanning electron microscope or other inspection tools. A number of pixels in the image that exceed a corresponding threshold in the matrix can be quantified.
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