| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_098eb10caca2ec84776ff778d593a596
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C49-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C49-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-065 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C251-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate |
2019-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebf4acd6e904c8e27a14739fa609f194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4206dd6c2323f9f1a72cc50b84166fa9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f028b94ed6d43f6a61be1ddfdaaadf92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03f024927e610399d73923986a1a9022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e5bf06df2c439259edabf3c12029aac |
| publicationDate |
2020-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2020100765-A1 |
| titleOfInvention |
Cobalt complex, method for manufacturing same, and method for manufacturing cobalt-containing thin film |
| abstract |
Provided is a cobalt complex which is liquid at room temperature and useful for manufacturing a cobalt-containing thin film under conditions without using an oxidizing gas. A cobalt complex represented by formula (1). (L1 and L2 represent a unidentate amide ligand of formula (A), a bidentate amide ligand of formula (B) or a heteroatom-containing ligand of formula (C).) (R1 and R2 represent a C1-C6 alkyl group or a tri(C1-C6 alkyl)silyl group. A wiggly line represents an atomic bonding with a cobalt atom.) (R3 represents a tri(C1-C6 alkyl)silyl group. R4 and R5 represent a C1-C4 alkyl group. X represents a C1-C6 alkylene group.) (R6and R8 represent a C1-C6 alkyl group. R7 represents a hydrogen atom or a C1-C4 alkyl group. Y represents an oxygen atom or NR9. Z represents an oxygen atom or NR10. R9 and R10 independently represent a C1-C6 alkyl group.) |
| priorityDate |
2018-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |