http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020100710-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-075 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2019-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc088ca22e0cd5226baa2bbb209e55ff |
| publicationDate | 2020-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2020100710-A1 |
| titleOfInvention | Pattern forming method, transistor manufacturing method, and film for pattern formation |
| abstract | This pattern forming method for forming a pattern on a surface to be treated of an object is provided with: a step for forming an oxide film layer on the surface to be treated; a step for forming a compound-containing layer having a photosensitive deprotecting group by applying a compound-containing composition having the photosensitive deprotecting group onto the oxide film layer; a step for generating a latent image comprising a hydrophilic region and a water-repellent region by irradiating the compound-containing layer having the photosensitive deprotecting group with light with a predetermined pattern; and a step for disposing a pattern forming material in at least part of the hydrophilic region or at least part of the water-repellent region. |
| priorityDate | 2018-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.