| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0f3034f877d959ebb214ad10d763c44 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8848
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2210-56 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-2441
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-303
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24 |
| filingDate |
2018-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9352448b3ee1dc10712cb15eb25e638 |
| publicationDate |
2020-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2020068142-A1 |
| titleOfInvention |
Interferometer with pixelated phase shift mask |
| abstract |
An interferometer uses a phase shift mask that includes an array of pixels that are aligned with a corresponding array of pixels of a detector. Each pixel in the phase shift mask is adapted to produce one of a number of predetermined phase shifts between a test beam and a reference beam. For example, the pixels may be linear polarizers or phase delay elements having one of the number of polarizer orientations or phase delays to produce the predetermined phase shifts between the test beam and the reference beam. The pixels in the phase shift mask are arranged in the array to include each of the predetermined phase shifts in repeating pixel groups in rows that are one column wide, columns that are one row high, or blocks of multiple rows and columns. |
| priorityDate |
2018-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |