| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20aafbfac3c11f76db2fb50e4ee18dae |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G13-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G4-085 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-503
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G4-145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-503 |
| filingDate |
2019-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d2f38bb289fc4d16ea8d9308c494404 |
| publicationDate |
2020-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2020065334-A1 |
| titleOfInvention |
Method of processing substrate for an energy storage device |
| abstract |
The present invention relates to a method of processing a substrate for an energy storage device comprising providing a drum arranged to transport a moving substrate, the drum having an electromagnetic charge. A substrate to be moved is provided and a plurality of curing stations are provided around the circumference of the drum. Each curing station performs the steps of depositing a precursor on the surface of the moving substrate, generating a plasma and directing the plasma onto the surface of the moving substrate such that the precursor is reacted to form a material layer on the substrate without substantially raising the temperature of the substrate. |
| priorityDate |
2018-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |