http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020037264-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e41651508566f0385833e1ba14a21ffd |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28185 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate | 2019-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bf36a2013e5ca17e589a906b520c993 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b2c679ded8925bbec944a6cfaadde09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffd6276741b8aafe9487abe43023e508 |
publicationDate | 2020-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | WO-2020037264-A1 |
titleOfInvention | Method of forming ion sensors |
abstract | A method for manufacturing a sensor includes etching an insulator layer disposed over a substrate to define an opening exposing a sensor surface of a sensor disposed on the substrate, a native oxide forming on the sensor surface; annealing the sensor surface in a hydrogen containing atmosphere and annealing the sensor surface in an oxygen atmosphere at a temperature of not greater than 400°C. Further a conformal conductive layer may be formed on top of sensor surface, with parts being on top surface of insulator layer being removed, thus forming a cup-shaped electrode, the top surface of the cup-shaped electrode may be annealed in a hydrogen containing atmosphere and annealed in an oxygen atmosphere at a temperature of not greater than 400°C. |
priorityDate | 2018-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.