http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020021083-A1

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publicationDate 2020-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2020021083-A1
titleOfInvention Organometallic compounds for the manufacture of a semiconductor element or electronic memory
abstract The invention relates to compounds in accordance with the general formula [Ru(arene)(Ra-N=CR1-CR3=N-Rb)] or [Ru(arene)((Rc,Rd)N-N=CRH1-CRH3=N-N(Re,Rf))]. In this case, arene is selected from the group consisting of mononuclear and polynuclear arenes and heteroarenes. R1, R3, RH1, RH3 and Ra - Rf are independently selected from the group consisting of H, an alkyl radical (C1 - C10) and an aryl radical. It further relates to methods for the production of these compounds, compounds obtainable according to these methods, their use and a substrate having on a surface thereof a ruthenium layer or a layer containing ruthenium. In addition, the invention relates to a method for producing compounds [Ru(arene)X2]2, wherein arene is selected from the group consisting of mononuclear and polynuclear arenes and X = halogen, compounds of this type obtainable according to this method, and their use. The aforementioned ruthenium(O) compounds can be produced in a simple, cost- effective and reproducible manner with a high degree of purity and good yield. Due to their high degree of purity, they are suitable for use as ruthenium(O) precursors.
priorityDate 2018-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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