| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e66be87630d7cef0ce770e1d898eec |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C53-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C57-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C53-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C57-04 |
| filingDate |
2019-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0304e933eea2fb2cb39fa5ae3f3839e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c4cc53767f5dd9ca179bbb161047706 |
| publicationDate |
2020-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2020004172-A1 |
| titleOfInvention |
Organically modified metal oxide nanoparticles, production method thereof, euv photoresist material and production method for etching mask |
| abstract |
Provided are organically modified metal oxide nanoparticles that can be produced in a simple manner and that can increase the sensitivity and resolution of resist materials. A EUV photoresist material includes organically modified metal oxide nanoparticles and a solvent. The organically modified metal oxide nanoparticles include a core, a first modification group and a second modification group. The core includes multiple metals and multiple oxygen atoms bonded to the multiple metals. The first modification group is a carboxylic acid carboxylate ligand that is coordinated to the core. The second modification group is: a carboxylic acid carboxylate ligand that is coordinated to the core and that has a smaller molecular weight than the first modification group; and/or an inorganic negative ion that is smaller than the first modification group. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11747724-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111948904-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022033367-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111948904-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112462572-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021191261-A1 |
| priorityDate |
2018-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |