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filingDate 2019-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019246426-A1
titleOfInvention An apparatus and method for the minimization of undercut during a ubm etch process
abstract A semiconductor etch process is provided in which an undercut is minimized during an etch process through tight control of etch profile, recognition of etch completion, and minimization of over etch time to increase productivity.
priorityDate 2018-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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