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publicationDate 2019-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019225856-A1
titleOfInvention Composition for etching silicon nitride film and etching method using same
abstract Disclosed are a composition for etching a silicon nitride film, the composition comprising: a phosphoric acid compound; water; and one or more of a certain silane-based compound and a reaction product thereof, and an etching method using same.
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