| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_07c9542186133097bd6bbb7d92393090
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5db9cdd187adb66ccd4f9a4d6a716e68 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0169
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2019-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42ad1b42df875241ed5646389a3eb237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5705936308ac008f00f224d816f9058 |
| publicationDate |
2019-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2019200028-A1 |
| titleOfInvention |
Stiction-aided fabrication of flat nanomembranes for microelectronics applications |
| abstract |
Methods for forming stable, suspended nanomembranes are provided. Also provided are stable, suspended nanomembranes made using the methods and electronic devices that incorporate the stable, suspended nanomembranes as electronically active layers. The methods utilize stiction-aided nanomembrane flattening combined with ultraviolet (UV) radiation-induced adhesion enhancement. |
| priorityDate |
2018-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |