http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019188901-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B7-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B7-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2019-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e962daa8e899f5294fa8c79cc08a7c77 |
| publicationDate | 2019-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2019188901-A1 |
| titleOfInvention | Production method for semiconductor substrate, and set such as polishing composition set |
| abstract | Provided is a production method for a semiconductor substrate. The production method makes it possible to control the post-production shape of the substrate to a high degree. This production method for a semiconductor substrate includes a back surface processing step for processing a back surface of a wafer-shaped processing target. After the back surface processing step, there is a processing distortion layer on the back surface. The depth of the processing distortion layer that is on the back surface is greater than the depth of a processing distortion layer that is on a front surface of the semiconductor substrate, or there is no processing distortion layer on the front surface. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022168859-A1 |
| priorityDate | 2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 111.