http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019182063-A1

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filingDate 2019-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b8a67ad410453d6db3bb7a3e392cd82
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publicationDate 2019-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019182063-A1
titleOfInvention Slurry, slurry set and polishing method
abstract One aspect of this invention contains: an abrasive; a hydroxy acid; a polyol; at least one type of zwitterion compound selected from a group comprising amino carboxylic acids and amino sulfonic acids; and a liquid medium. The zeta potential of the abrasive is positive, the isoelectric point of the amino carboxylic acid is less than 7.0, and the pKa of the amino sulfonic acid is greater than 0.
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priorityDate 2018-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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