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filingDate 2018-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019181045-A1
titleOfInvention Treatment solution and treatment method
abstract A treatment solution is provided. The treatment solution is for treating by-products generated by a method in which a gas containing silicon and halogen is used to deposit a silicon-containing substance on a substrate. The treatment solution contains inorganic bases and/or organic bases, and is basic.
priorityDate 2018-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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