http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019181016-A1

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publicationDate 2019-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019181016-A1
titleOfInvention Polishing liquid, polishing liquid set, and polishing method
abstract This polishing liquid contains: abrasive grains; a hydroxy acid; a polymer compound having at least one selected from the group consisting of a hydroxyl group and an amide group; and a liquid medium, wherein the zeta potential of the abrasive grains is positive, and the weight-average molecular weight of the polymer compound is 3000 or more.
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priorityDate 2018-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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