| abstract |
A polishing liquid that contains abrasive grains, a hydroxy acid, a polyol, at least one zwitterionic compound selected from the group that consists of aminocarboxylic acids and aminosulfonic acids, and a liquid medium. The zeta potential of the abrasive grains is positive, the isoelectric point of the aminocarboxylic acids is lower than 7.0, and the pKa of the aminosulfonic acids is greater than 0. |