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filingDate 2018-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019160570-A1
titleOfInvention System and method of fabricating tim-less hermetic flat top his/emi shield package
abstract Disclosed is a semiconductor device and method of manufacturing a semiconductor device that includes planarizing surfaces of a semiconductor substrate and a carrier substrate and then placing the semiconductor substrate on the carrier substrate such that the planarized surfaces of each are adjoining and allowing the semiconductor substrate to bond to the carrier substrate using a Van der Waals force. The method also includes forming a metal filled trench around the semiconductor substrate and in contact with the carrier substrate, which can also be formed of metal. The metal filled trench and carrier substrate together form a metal cage-like structure around the semiconductor substrate that can serve as a heat sink, integrated heat spreader, and Electro- Magnetic Interference shield for the semiconductor substrate.
priorityDate 2018-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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