Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e16d1b3130c75f905199bb431589879 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-14865 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-14532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-327 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4115 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B5-145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-18 |
filingDate |
2019-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7aa28360de17618b89056f05fbf39569 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6b71766b928bc6b4539e86144596eff |
publicationDate |
2019-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2019157106-A2 |
titleOfInvention |
Methods for controlling physical vapor deposition metal film adhesion to substrates and surfaces |
abstract |
A method of depositing of a film on a substrate with controlled adhesion. The method comprises depositing the film including metal, wherein the metal is deposited on the substrate using physical vapor deposition at a pressure that achieves a pre-determined adhesion of the film to the substrate. The pre-determined adhesion allows processing of the film into a device while the film is adhered to the substrate but also allows removal of the device from the substrate. |
priorityDate |
2018-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |