http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019144370-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_275001b632735f2d881cb3fea6599af0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R17-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R17-00 |
| filingDate | 2018-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_149d52f9417100515f7178418d7c8705 |
| publicationDate | 2019-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2019144370-A1 |
| titleOfInvention | Mems piezoelectric speaker and preparation method therefor |
| abstract | A MEMS piezoelectric speaker and a preparation method therefor. The MEMS piezoelectric speaker comprises: a substrate (10), the central region thereof being a hollow region; an organic vibration film layer (50), located above the hollow region of the substrate (10), and separated from the substrate (10); and a structural beam distributed in a spoke shape, formed on the substrate (10), and supporting the organic vibration film layer (50), the structural beam from bottom to top comprising: a composite dielectric layer (20) and a piezoelectric unit (30), a void portion therebetween in the structural beams being a structural groove (70); the structural beam and the organic vibration film layer (50) form a piezoelectric composite vibration film. The structural groove (70) of the MEMS piezoelectric speaker enables the piezoelectric composite vibration film to release the stress thereof, and the piezoelectric unit on the structural beam easily causes, under the effect of electric load, the entire piezoelectric composite vibration film to generate a large amplitude vibration, thereby improving the sensitivity of the piezoelectric speaker. |
| priorityDate | 2018-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.