http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019141635-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ab79675ade59234c5b5631c0d1b33404 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-286 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-286 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-064 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 |
| filingDate | 2019-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_774e22f77ef1a585ec7e5347f5cb5917 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a6e53c34e1658dccd98e99ef5912097 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2bd6f42076885b40aaf5fd42ce99f01 |
| publicationDate | 2019-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2019141635-A1 |
| titleOfInvention | Method of laser irradiation of a patterned semiconductor device |
| abstract | The present invention relates to a method of laser irradiation of a patterned semiconductor device comprising a periodic array of sub-wavelength fin-like structures, all fin-like structures upstanding from a base face of said semiconductor device and defining an upper face of said periodic array opposite to said base face, each fin-like structure having: - a width along a first direction parallel to the base face of the order of magnitude or smaller than the laser wavelength; - a length along a second direction parallel to said base face and perpendicular to said first direction at least 3 times greater than said width; and - a height along a third direction perpendicular to said base face. said method of laser irradiation comprising the steps of: - generating a UV pulsed laser beam by means of a laser module; - irradiating at least a portion of said upper face with said laser beam, According to the invention, the method further comprises imparting a controlled state of polarization to said laser beam so as to selectively control the amount of energy of the laser beam coupled locally to each fin-like structure along the third direction. |
| priorityDate | 2018-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7786024-B2 |
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544408 |
Total number of triples: 24.