http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019134528-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6486e2441acfcead84ce78a51bd8747b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2018-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d37a77aed1d80508873f0b5c2071d5c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa9d974c87ed7c9af341aefe9c445a89 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5b54b9e0997df20288dd757abd1b4ac |
| publicationDate | 2019-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2019134528-A1 |
| titleOfInvention | Photoresist composite using poly (p-hydroxystyrene)-containing epoxy resin as film-forming resin |
| abstract | A photoresist composite using a formula (I)-containing polymer as a film-forming resin. Ra-Rd, Ra0-Rd0, Ra1-Rd1, Ra2-Rd2, n, n0, n1, and n2 are as defined in the description. A film-forming polymer contained in the photoresist composite has, when being used as the film-forming resin of the photoresist, the advantages of good ultraviolet light permeability, fast photosensitive speed, and high resolution ratio, and moreover, a thick film can be formed because of high viscosity. The photoresist is a negative thick film photoresist which can be applied to the advanced packaging technology and the MEMS manufacturing; according to requirements, a one-step film thickness uniform adhesive spinning piece is up to 20-100 μm, an independent line width range of the resolution ratio is more than 5 μm, and the sensitivity (in the film thickness of 20 μm) is 50-80 mJ/cm-2. |
| priorityDate | 2018-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 214.