http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019131545-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2018-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0c16cae095f86f409a986ea85e1cdb6 |
| publicationDate | 2019-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2019131545-A1 |
| titleOfInvention | Polishing solution composition for silicon oxide films |
| abstract | A polishing solution composition for silicon oxide films according to the present invention contains cerium oxide particles, a water-soluble polymeric compound and a water-based medium, wherein the water-soluble polymeric compound is a water-soluble polymeric compound containing a betaine structure (excluding a carbobetaine homopolymer and a sulfobetaine homopolymer). The water-soluble polymeric compound is preferably a water-soluble polymeric compound which contains a constituent unit A that contains a betaine structure and a constituent unit B that is a constituent unit other than the constituent unit A and contains at least one group selected from a primary amino group, a secondary amino group, a tertiary amino group, a quaternary ammonium group and a salt of any one of these groups. |
| priorityDate | 2017-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 79.