http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019111727-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2018-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b40ada315d0789564192dceb9481ef6d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb0045d24003e2a9c6df126e51068ac8 |
| publicationDate | 2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2019111727-A1 |
| titleOfInvention | Radiation-sensitive composition and resist pattern formation method |
| abstract | The present invention addresses the problem of providing: a radiation-sensitive composition having excellent sensitivity and nano edge roughness; and a resist pattern formation method. The present invention is a radiation-sensitive composition containing a metal-atom-containing compound and an electron acceptor, wherein the content of the metal-atom-containing compound is 50% by mass or more relative to a total solid content. It is preferred that a metal atom contained in the metal-atom-containing compound belongs to Periods 4 to 7 in Groups 4 to 16 on the periodic table. It is preferred that the metal atom contained in the metal-atom-containing compound is hafnium, tantalum, zinc, germanium or tin. It is preferred that the electron acceptor is a compound having a sulfonyl group, a compound having an aromatic hydroxy group, a tetracyanoquinodimethane compound or a combination thereof. |
| priorityDate | 2017-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 316.