| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d4bb510cace0428e3f5d989c2248638f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136295 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0331
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136231 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate |
2018-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d9173f0a32fcabdc951709b6a2961bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74c1a0095b688dd79ab386961045842a |
| publicationDate |
2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2019109445-A1 |
| titleOfInvention |
Fabrication method for tft array substrate and fabrication method for display device |
| abstract |
A fabrication method for an array substrate and display device, comprising: forming a water-soluble organic substance layer (103) on a surface of a passivation layer (102); forming a photoresist layer on a surface of the water-soluble organic substance layer (103); performing yellow light engineering to obtain a photoresist layer pattern and a water-soluble organic substance layer pattern, wherein a cross section of a water-soluble organic substance layer region (103a) is smaller than a cross section of the bottom surface of a photoresist region (104); dry etching the passivation layer (102) such that a cross section of a passivation layer pattern is the same as a cross section of the water-soluble organic substance layer pattern. |
| priorityDate |
2017-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |