| abstract |
Apparatuses and methodologies for electron beam probing for chip debugging and fault isolation are disclosed. In one example, an electron beam signal image mapping (ESIM) method is to scan an electron beam on an area on a chip containing an integrated circuit structure, to toggle a gate electrode of the one-frequency integrated circuit structure, amplifying a secondary electron signal and sending the amplified secondary electron signal to a frequency-tuned interlocking amplifier or frequency analyzer, inputting an output of the amplifier or a spectrum analyzer in a scanning control unit that scans the area, and illuminating a portion of the integrated circuit structure with the electron beam to modulate the secondary electron signal. |