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publicationDate 2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019043270-A1
titleOfInvention CHEMICAL REACTORS
abstract The invention relates to a method for producing a chemical reactor device on the basis of a fluid flow 5. The method comprises obtaining a substrate with a fluid channel defined by a channel wall, wherein an ordered set of silicon pillar structures is positioned in the fluid channel, and the electrochemical anodizing of at least the silicon pillar structures to make them porous at least to a certain depth. After anodization, the substrate and abutment structures are heat-treated, the treatment being carried out at temperatures, times and atmospheres such that any formed silicon oxide layer has a thickness of less than 20 nm. The substrate and pillar structures are further functionalized.
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