| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_664f5b543543aac4cf0153a4ef4e0f85 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D19-0036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate |
2018-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df5cb96e164fcd8813cfcbebf8d34a08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abc374e7373e80d89bf5e8756dac4cee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_354e3b1f687cf2af1643dd58f19f2c24 |
| publicationDate |
2019-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2019040554-A1 |
| titleOfInvention |
MATERIALS CONTAINING ANTIMONY FOR ION IMPLANTATION |
| abstract |
The present invention relates to a novel method, a novel composition and a novel system for using dopant materials containing antimony. The composition is selected with a vapor pressure sufficient to flow into an arc chamber as part of an ion implantation process. The antimony-containing material is represented by a chemical formula that does not contain carbon, thereby reducing or eliminating the introduction of carbon-based deposits into the ion chamber. The composition is stored in a storage and dispensing container under stable conditions, which includes a moisture-free environment that does not contain traces of moisture. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3960897-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3699317-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021232036-A1 |
| priorityDate |
2017-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |