| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2017-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40c91ebb4c56ae5fed14224ca831e9fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3c34745ac274d54ee537f257589db50 |
| publicationDate |
2019-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2019035161-A1 |
| titleOfInvention |
Polishing fluid, polishing fluid set and polishing method |
| abstract |
According to the present invention, for a base comprising a substrate, a plug disposed on a surface of the substrate, and an insulation portion disposed on a surface of the plug, opposite the substrate, a polishing liquid CMP is used to remove a portion of the of the insulation part, and expose the cap. This polishing liquid comprises: an abrasive grain containing cerium; a water-soluble nonionic compound A; a polymeric compound B having at least one member selected from the group consisting of a carboxylic acid group and a carboxylate group; a basic pH regulator optionally contained; and water, the content of the basic pH regulator being less than 1.3 × 10 -2 mol / kg relative to the total mass of the polishing liquid. |
| priorityDate |
2017-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |