Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ab3bacac8137e739e35676ecb9eb5208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5c121269689cbab9b3a4548b15caf3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f1564bf371f1eccb79a407b11055dead |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01H11-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01H13-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N5-02 |
filingDate |
2018-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad684f6bb26dfa15fdf270fa114ca69e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81ec4f0b5e151fa2ddb62510bf00bc19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3924324e7686c6d5bf985df708353b6 |
publicationDate |
2019-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2019026456-A1 |
titleOfInvention |
Vibration detection element and method of manufacturing the same |
abstract |
A vibration sensing element (10) comprises base material sections (1-3), a support member (22), a support member (32) and a vibrator (4). The base material sections (1-3) comprise a gap section (SP) having a lower surface (21A) and a lower surface (31A) facing the lower surface (21A). The support member (22) projects in the direction from the bottom surface (21A) to the bottom surface (31A) of the space section (SP). The support member (32) projects in the direction from the lower surface (31A) to the lower surface (21A) of the space section. The vibrator (4) is disposed in contact with the support member (22) or the support member (32) so that the vibrator can vibrate in the space section (SP), said vibrator having a thickness less than 10 μm. Each of the support members (22, 32) includes a plurality of support sections that prevent the vibrator (4) from contacting the lower surface (21A) or lower surface (31A). |
priorityDate |
2017-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |