http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019020569-A1

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filingDate 2018-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4870ac034cadc5ca19a0801f5a28ec31
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publicationDate 2019-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019020569-A1
titleOfInvention ELECTRODE ARRANGEMENT FOR DIELECTRICALLY INTERFERED PLASMA PROCESSING
abstract An electrode arrangement for dielectrically impeded plasma treatment of a surface of a body, provided with at least one flexible flat electrode (1) and a dielectric (2) of a first flexible material plate which protects the electrode (1) of the surface to be treated with a layer (3) preventing direct current flow. The dielectric (2) can rest by means of a structure (4) provided with shoulders (7) on the surface to be treated, air spaces (5) which have an open side towards the surface to be treated and a closure the bottom side through the layer (3) preventing a direct current flow of the dielectric (2) being formed between the shoulders (7) for the constitution of the plasma. The structure (4) comprises a plurality of distance elements (6) of a second material whose flexibility is less than the flexibility of the first material, and the shoulders (7) of the structure (4) are partially or completely made up of through the distance elements (6).
priorityDate 2017-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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