http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019016642-A1

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publicationDate 2019-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2019016642-A1
titleOfInvention SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
abstract The invention relates to a semiconductor device having stable electrical characteristics. The invention further relates to a highly reliable semiconductor device. The present invention uses: a first conductor and a second conductor on a first metal oxide; a second metal oxide on the first conductor, the second conductor and the first metal oxide; a first insulator on the second metal oxide; a first barrier layer on the first insulator; a third conductor on the first barrier layer; and a second barrier layer on the third conductor. The first barrier layer contacts the second barrier layer on a side surface of the third conductor.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3945596-A1
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