| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24592
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2445 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-225 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00 |
| filingDate |
2018-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c96358a25834dc93334d5a0ebe9452e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec17781dfe0ae4b56e12ce77f1b91ffe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71a60c872bd06f5833f339044c188044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c571f6f9711b0af005f7025f5154bf4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f591ba3cfc48fdde5d36805de8452ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c7a8e77ccd00874bc152680c160259f |
| publicationDate |
2019-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2019011608-A1 |
| titleOfInvention |
INSPECTION TOOL, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC SYSTEM, INSPECTION METHOD, AND DEVICE MANUFACTURING METHOD |
| abstract |
An inspection tool for inspecting a semiconductor substrate. The inspection tool includes: - a substrate table configured to hold the substrate; an electron beam source configured to project an electron beam onto an area of interest of the substrate, the zone of interest comprising a buried structure; a cathodoluminescent detector configured to detect the cathodoluminescent light emitted by the buried structure; a control unit configured to: control the electron beam source in order to project an electron beam onto the area of interest; receiving a signal representative of the cathodoluminescent light detected; - Determine, on the basis of the signal, a characteristic of the buried structure. |
| priorityDate |
2017-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |